JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

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Journal Title

J VAC SCI TECHNOL B

ISSN / eISSN

1071-1023

Aims and Scope

Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.

Subject Area

ENGINEERING, ELECTRICAL & ELECTRONIC

NANOSCIENCE & NANOTECHNOLOGY

PHYSICS, APPLIED

CiteScore

CiteScore Ranking

Web of Science Core Collection

Science Citation Index Expanded (SCIE)	Social Sciences Citation Index (SSCI)
Indexed	-

Category (Journal Citation Reports 2023)	Quartile
ENGINEERING, ELECTRICAL & ELECTRONIC - SCIE	Q4
NANOSCIENCE & NANOTECHNOLOGY - SCIE	Q4
PHYSICS, APPLIED - SCIE	Q4

Country/Area of Publication

UNITED STATES

Publisher

A V S AMER INST PHYSICS

Publication Frequency

Bimonthly

Year Publication Started

1991

Annual Article Volume

155

Open Access

Contact

A V S AMER INST PHYSICS, STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502

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Verified Reviews

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A little slow. One reviewer provided useful suggestions from an experimental perspective, while the other one passed it directly.

2022-10-28

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