Near neighbor averaging: A technique for improving image uniformity in aperture array lithography

Published 2009 View Full Article

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Title
Near neighbor averaging: A technique for improving image uniformity in aperture array lithography
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 6, Pages 2674
Publisher
American Vacuum Society
Online
2009-12-15
DOI
10.1116/1.3265462
References
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