Direct write of optical waveguides on chalcogenide thin films using electron beams

Title
Direct write of optical waveguides on chalcogenide thin films using electron beams
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 6, Pages 2737
Publisher
American Vacuum Society
Online
2009-12-15
DOI
10.1116/1.3265542

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