JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

期刊名
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

J VAC SCI TECHNOL B

ISSN / eISSN
1071-1023
目标和范围
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.
研究方向

工程:电子与电气

纳米科技

物理:应用

CiteScore
-
CiteScore 学科排名
-
Web of Science 核心合集
Science Citation Index Expanded (SCIE) Social Sciences Citation Index (SSCI)
Indexed -
类别 (Journal Citation Reports 2023) 分区
ENGINEERING, ELECTRICAL & ELECTRONIC - SCIE Q4
NANOSCIENCE & NANOTECHNOLOGY - SCIE Q4
PHYSICS, APPLIED - SCIE Q4
出版国家或地区
UNITED STATES
出版商
A V S AMER INST PHYSICS
出版周期
Bimonthly
出版年份
1991
年文章数
155
Open Access
NO
通讯方式
A V S AMER INST PHYSICS, STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502
认证评论
注: 认证评论选取于全球各个学术评论平台和社交媒体。
A little slow. One reviewer provided useful suggestions from an experimental perspective, while the other one passed it directly.
2022-10-28

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