友情提示:以下期刊信息可能会有更新,仅供参考,请在投稿前自行登录期刊官网仔细核实。
期刊名
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
J VAC SCI TECHNOL B
ISSN / eISSN
1071-1023
目标和范围
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.
研究方向
工程:电子与电气
纳米科技
物理:应用
CiteScore
-
CiteScore 学科排名
-
Web of Science 核心合集
Science Citation Index Expanded (SCIE) | Social Sciences Citation Index (SSCI) |
---|---|
Indexed | - |
类别 (Journal Citation Reports 2023) | 分区 |
---|---|
ENGINEERING, ELECTRICAL & ELECTRONIC - SCIE | Q4 |
NANOSCIENCE & NANOTECHNOLOGY - SCIE | Q4 |
PHYSICS, APPLIED - SCIE | Q4 |
出版国家或地区
UNITED STATES
出版商
A V S AMER INST PHYSICS
出版周期
Bimonthly
出版年份
1991
年文章数
155
Open Access
NO
通讯方式
A V S AMER INST PHYSICS, STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502
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