A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
出版年份 2018 全文链接
标题
A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
作者
关键词
SU-8 polymer, Surface stress, Biological sensor, Cantilever, Chemical sensor, Piezoresistor, Immobilization
出版物
Nano-Micro Letters
Volume 10, Issue 2, Pages -
出版商
Springer Nature
发表日期
2018-02-02
DOI
10.1007/s40820-018-0189-1
参考文献
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