Cantilever-like micromechanical sensors

标题
Cantilever-like micromechanical sensors
作者
关键词
-
出版物
REPORTS ON PROGRESS IN PHYSICS
Volume 74, Issue 3, Pages 036101
出版商
IOP Publishing
发表日期
2011-03-02
DOI
10.1088/0034-4885/74/3/036101

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