Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

标题
Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 85, Issue 5-6, Pages 1120-1123
出版商
Elsevier BV
发表日期
2008-02-06
DOI
10.1016/j.mee.2008.01.082

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