A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
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Title
A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
Authors
Keywords
SU-8 polymer, Surface stress, Biological sensor, Cantilever, Chemical sensor, Piezoresistor, Immobilization
Journal
Nano-Micro Letters
Volume 10, Issue 2, Pages -
Publisher
Springer Nature
Online
2018-02-02
DOI
10.1007/s40820-018-0189-1
References
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