Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications

标题
Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 24, Issue 3, Pages 035018
出版商
IOP Publishing
发表日期
2014-02-28
DOI
10.1088/0960-1317/24/3/035018

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