Cantilever-based sensing: the origin of surface stress and optimization strategies

标题
Cantilever-based sensing: the origin of surface stress and optimization strategies
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 21, Issue 7, Pages 075501
出版商
IOP Publishing
发表日期
2010-01-19
DOI
10.1088/0957-4484/21/7/075501

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