Piezoresistive Composite Silicon Dioxide Nanocantilever Surface Stress Sensor: Design and Optimization

标题
Piezoresistive Composite Silicon Dioxide Nanocantilever Surface Stress Sensor: Design and Optimization
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 18, Issue 5, Pages 3387-3397
出版商
American Scientific Publishers
发表日期
2017-11-30
DOI
10.1166/jnn.2018.14642

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