Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

标题
Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
作者
关键词
-
出版物
ADVANCED MATERIALS
Volume 21, Issue 5, Pages 593-596
出版商
Wiley
发表日期
2008-12-02
DOI
10.1002/adma.200802611

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