Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films

标题
Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 93, Issue 2, Pages 021903
出版商
AIP Publishing
发表日期
2008-07-15
DOI
10.1063/1.2957654

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