标题
Piezoelectric aluminum nitride thin films for microelectromechanical systems
作者
关键词
-
出版物
MRS BULLETIN
Volume 37, Issue 11, Pages 1051-1061
出版商
Cambridge University Press (CUP)
发表日期
2012-11-12
DOI
10.1557/mrs.2012.268
参考文献
相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。- Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films
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