Si-containing block copolymers for self-assembled nanolithography

标题
Si-containing block copolymers for self-assembled nanolithography
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 2489-2494
出版商
American Vacuum Society
发表日期
2008-12-16
DOI
10.1116/1.2981079

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