Potential of a rotary stage electron beam mastering system for fabricating patterned magnetic media

标题
Potential of a rotary stage electron beam mastering system for fabricating patterned magnetic media
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 2611-2618
出版商
American Vacuum Society
发表日期
2008-12-16
DOI
10.1116/1.3013277

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