标题
High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates
作者
关键词
-
出版物
ADVANCED MATERIALS
Volume 24, Issue 42, Pages 5688-5694
出版商
Wiley
发表日期
2012-08-20
DOI
10.1002/adma.201202361
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
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