A Path to Ultranarrow Patterns Using Self-Assembled Lithography

标题
A Path to Ultranarrow Patterns Using Self-Assembled Lithography
作者
关键词
-
出版物
NANO LETTERS
Volume 10, Issue 3, Pages 1000-1005
出版商
American Chemical Society (ACS)
发表日期
2010-02-10
DOI
10.1021/nl904141r

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