Investigating elastic recovery of monocrystalline silicon during plunging experiments with chamfered diamond tools
出版年份 2023 全文链接
标题
Investigating elastic recovery of monocrystalline silicon during plunging experiments with chamfered diamond tools
作者
关键词
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出版物
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 84, Issue -, Pages 119-135
出版商
Elsevier BV
发表日期
2023-08-03
DOI
10.1016/j.precisioneng.2023.08.002
参考文献
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