Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo

出版年份 2017 全文链接

标题

作者

关键词

Single-crystal silicon, Ultraprecision cutting, Diamond turning, Slow tool servo, Microlens array, Infrared optics

出版物

Volume 115, Issue -, Pages 2-14

出版商

Elsevier BV

发表日期

2016-11-27

DOI

10.1016/j.ijmachtools.2016.11.004

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