Towards understanding the mechanism of vibration-assisted cutting of monocrystalline silicon by cyclic nanoindentation
出版年份 2022 全文链接
标题
Towards understanding the mechanism of vibration-assisted cutting of monocrystalline silicon by cyclic nanoindentation
作者
关键词
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出版物
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 311, Issue -, Pages 117797
出版商
Elsevier BV
发表日期
2022-10-12
DOI
10.1016/j.jmatprotec.2022.117797
参考文献
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