Modeling and simulation of phase transformation and crack formation during scribing of mono-crystalline silicon

出版年份 2020 全文链接

标题

作者

关键词

Constitutive model, Phase transformation, Crack propagation, Scribing, Silicon

出版物

Volume 175, Issue -, Pages 105527

出版商

Elsevier BV

发表日期

2020-02-13

DOI

10.1016/j.ijmecsci.2020.105527

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