Effect of speed on material removal behavior in scribing of monocrystalline silicon

标题
Effect of speed on material removal behavior in scribing of monocrystalline silicon
作者
关键词
Material removal behavior, High-speed scribing, Strain rate, Monocrystalline silicon
出版商
Elsevier BV
发表日期
2020-08-03
DOI
10.1016/j.precisioneng.2020.07.011

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