An analytical and FEM simulation-based study of the dependence of capacitance profile on structural parameters of CMUT with and without vent
出版年份 2023 全文链接
标题
An analytical and FEM simulation-based study of the dependence of capacitance profile on structural parameters of CMUT with and without vent
作者
关键词
-
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume -, Issue -, Pages -
出版商
Springer Science and Business Media LLC
发表日期
2023-10-11
DOI
10.1007/s00542-023-05537-3
参考文献
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