Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function

标题
Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function
作者
关键词
-
出版物
Journal of Sensors
Volume 2011, Issue -, Pages 1-12
出版商
Hindawi Limited
发表日期
2011-09-30
DOI
10.1155/2011/581910

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