Collapse voltage analysis of central annular ring metallized membrane based MEMS micromachined ultrasonic transducer
出版年份 2019 全文链接
标题
Collapse voltage analysis of central annular ring metallized membrane based MEMS micromachined ultrasonic transducer
作者
关键词
-
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume -, Issue -, Pages -
出版商
Springer Science and Business Media LLC
发表日期
2019-09-05
DOI
10.1007/s00542-019-04613-x
参考文献
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