An analytical and FEM simulation-based study of the dependence of capacitance profile on structural parameters of CMUT with and without vent
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Title
An analytical and FEM simulation-based study of the dependence of capacitance profile on structural parameters of CMUT with and without vent
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume -, Issue -, Pages -
Publisher
Springer Science and Business Media LLC
Online
2023-10-11
DOI
10.1007/s00542-023-05537-3
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