An analytical and FEM simulation-based study of the dependence of capacitance profile on structural parameters of CMUT with and without vent

Title
An analytical and FEM simulation-based study of the dependence of capacitance profile on structural parameters of CMUT with and without vent
Authors
Keywords
-
Publisher
Springer Science and Business Media LLC
Online
2023-10-11
DOI
10.1007/s00542-023-05537-3

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