An efficient electrostatic actuation model for MEMS-based ultrasonic transducers with fringing effect
出版年份 2023 全文链接
标题
An efficient electrostatic actuation model for MEMS-based ultrasonic transducers with fringing effect
作者
关键词
-
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume -, Issue -, Pages -
出版商
Springer Science and Business Media LLC
发表日期
2023-01-27
DOI
10.1007/s00542-023-05412-1
参考文献
相关参考文献
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