Effects of fringing capacitances and electrode’s finiteness in improved SiC membrane based micromachined ultrasonic transducers
出版年份 2021 全文链接
标题
Effects of fringing capacitances and electrode’s finiteness in improved SiC membrane based micromachined ultrasonic transducers
作者
关键词
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出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume -, Issue -, Pages -
出版商
Springer Science and Business Media LLC
发表日期
2021-01-03
DOI
10.1007/s00542-020-05135-7
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