Analysis of spring softening effect on the collapse voltage of capacitive MEMS ultrasonic transducers
出版年份 2018 全文链接
标题
Analysis of spring softening effect on the collapse voltage of capacitive MEMS ultrasonic transducers
作者
关键词
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出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume -, Issue -, Pages -
出版商
Springer Nature
发表日期
2018-07-21
DOI
10.1007/s00542-018-4040-x
参考文献
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