Micro-electro-mechanical-system based capacitive ultrasonic transducer as an efficient immersion sensor
出版年份 2019 全文链接
标题
Micro-electro-mechanical-system based capacitive ultrasonic transducer as an efficient immersion sensor
作者
关键词
-
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume -, Issue -, Pages -
出版商
Springer Nature
发表日期
2019-03-12
DOI
10.1007/s00542-019-04384-5
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Analysis of spring softening effect on the collapse voltage of capacitive MEMS ultrasonic transducers
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