Recent progress for obtaining the ferroelectric phase in hafnium oxide based films: impact of oxygen and zirconium

标题
Recent progress for obtaining the ferroelectric phase in hafnium oxide based films: impact of oxygen and zirconium
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 58, Issue SL, Pages SL0801
出版商
Japan Society of Applied Physics
发表日期
2019-09-19
DOI
10.7567/1347-4065/ab45e3

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