Imprint issue during retention tests for HfO2-based FRAM: An industrial challenge?

标题
Imprint issue during retention tests for HfO2-based FRAM: An industrial challenge?
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 118, Issue 8, Pages 082901
出版商
AIP Publishing
发表日期
2021-02-23
DOI
10.1063/5.0035687

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