Through-process modeling and experimental verification of titanium carbonitride coating prepared by moderate temperature chemical vapor deposition

出版年份 2018 全文链接

标题

作者

关键词

Chemical vapor deposition, Titanium carbonitride, Thermodynamic calculation, Computational fluid dynamics, Chemical composition, Deposition rate

出版物

Volume 359, Issue -, Pages 278-288

出版商

Elsevier BV

发表日期

2018-12-24

DOI

10.1016/j.surfcoat.2018.12.096

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