Influence of pressure on chemical vapor deposition of boron nitride from BCl3/NH3/H2 gas mixtures

标题
Influence of pressure on chemical vapor deposition of boron nitride from BCl3/NH3/H2 gas mixtures
作者
关键词
-
出版物
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
出版商
Elsevier BV
发表日期
2019-10-25
DOI
10.1016/j.ceramint.2019.10.218

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