Low-temperature SiO2 film coatings onto Cu particles using the polygonal barrel-plasma chemical vapor deposition method
出版年份 2022 全文链接
标题
Low-temperature SiO2 film coatings onto Cu particles using the polygonal barrel-plasma chemical vapor deposition method
作者
关键词
Polygonal barrel-plasma chemical vapor deposition (PB-PCVD) system, Particle surface modification, Ceramic coating, SiO, 2, film, Dry process
出版物
APPLIED SURFACE SCIENCE
Volume -, Issue -, Pages 152646
出版商
Elsevier BV
发表日期
2022-01-29
DOI
10.1016/j.apsusc.2022.152646
参考文献
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