Hot wire chemical vapor deposition for silicon photonics: An emerging industrial application opportunity

出版年份 2019 全文链接

标题

作者

关键词

Silicon photonics, Hot wire chemical vapor deposition, Silicon nitride, Mach-Zehnder interformeter, Multimode interferometer, Silicon photonics waveguides

出版物

THIN SOLID FILMS

Volume 676, Issue -, Pages 26-30

出版商

Elsevier BV

发表日期

2019-02-28

DOI

10.1016/j.tsf.2019.02.048

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