Effects of post cooling on the remnant polarization and coercive field characteristics of atomic layer deposited Al-doped HfO2 thin films

标题
Effects of post cooling on the remnant polarization and coercive field characteristics of atomic layer deposited Al-doped HfO2 thin films
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 601, Issue -, Pages 154039
出版商
Elsevier BV
发表日期
2022-06-22
DOI
10.1016/j.apsusc.2022.154039

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