标题
Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 108, Issue 24, Pages 242905
出版商
AIP Publishing
发表日期
2016-06-14
DOI
10.1063/1.4953787
参考文献
相关参考文献
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