Microstructures and properties of novel nanocomposite WNx coatings deposited by reactive magnetron sputtering

标题
Microstructures and properties of novel nanocomposite WNx coatings deposited by reactive magnetron sputtering
作者
关键词
WNx coatings, Reactive magnetron sputtering, Nanocomposite structure, Microstructure characterization, Mechanical property
出版物
APPLIED SURFACE SCIENCE
Volume 512, Issue -, Pages 145508
出版商
Elsevier BV
发表日期
2020-01-26
DOI
10.1016/j.apsusc.2020.145508

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