Deposition of thermally stable tungsten nitride thin films by reactive magnetron sputtering

标题
Deposition of thermally stable tungsten nitride thin films by reactive magnetron sputtering
作者
关键词
Tungsten nitride, Thermal stability, Magnetron sputtering, Decomposition, Nitrogen release
出版物
SURFACE & COATINGS TECHNOLOGY
Volume -, Issue -, Pages -
出版商
Elsevier BV
发表日期
2019-07-31
DOI
10.1016/j.surfcoat.2019.07.046

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