Sputtering yields for low-energy Ar+- and Ne+-ion bombardment

标题
Sputtering yields for low-energy Ar+- and Ne+-ion bombardment
作者
关键词
-
出版物
VACUUM
Volume 86, Issue 12, Pages 1979-1982
出版商
Elsevier BV
发表日期
2012-04-03
DOI
10.1016/j.vacuum.2012.03.055

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