Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering

出版年份 2017 全文链接

标题

作者

关键词

Magnetron sputtering, Tungsten sub-nitride, Thermal stability, Structure, Annealing, Thermal desorption spectroscopy

出版物

Volume 485, Issue -, Pages 1-7

出版商

Elsevier BV

发表日期

2016-12-10

DOI

10.1016/j.jnucmat.2016.12.009

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