Fabrication of tungsten nitride thin films by superimposed HiPIMS and MF system: Effects of nitrogen flow rate

出版年份 2020 全文链接

标题

作者

关键词

High-power impulse magnetron sputtering, Mid-frequency, Superimposed HiPIMS-MF, Tungsten nitride, Peak power density, Hysteresis

出版物

SURFACE & COATINGS TECHNOLOGY

Volume 393, Issue -, Pages 125743

出版商

Elsevier BV

发表日期

2020-04-06

DOI

10.1016/j.surfcoat.2020.125743

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