Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer

标题
Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer
作者
关键词
Oxidation resistance, Microstructure, High-temperature tribology, Magnetron sputtering, Nanocomposite coatings
出版物
APPLIED SURFACE SCIENCE
Volume 541, Issue -, Pages 148526
出版商
Elsevier BV
发表日期
2020-11-21
DOI
10.1016/j.apsusc.2020.148526

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