Hard yet tough CrN/Si3N4 multilayer coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering

出版年份 2019 全文链接

标题

作者

关键词

出版物

Volume 502, Issue -, Pages 144168

出版商

Elsevier BV

发表日期

2019-10-17

DOI

10.1016/j.apsusc.2019.144168

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