Oxidation resistance and mechanical property of cosputtered quasi-amorphous Ta–Si–N films under vacuum rapid thermal annealing

出版年份 2010 全文链接

标题

Oxidation resistance and mechanical property of cosputtered quasi-amorphous Ta–Si–N films under vacuum rapid thermal annealing

作者

关键词

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出版物

SURFACE & COATINGS TECHNOLOGY

Volume 205, Issue 5, Pages 1268-1272

出版商

Elsevier BV

发表日期

2010-08-26

DOI

10.1016/j.surfcoat.2010.08.080

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