Influence of Zr and O on the structure and properties of TiC(N) coatings deposited by magnetron sputtering of composite TiC0.5+ZrO2 and (Ti, Zr)C0.5+ZrO2 targets
Influence of Zr and O on the structure and properties of TiC(N) coatings deposited by magnetron sputtering of composite TiC0.5+ZrO2 and (Ti, Zr)C0.5+ZrO2 targets
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