Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer

Analysis of morphological, microstructural, electrochemical and nano mechanical characteristics of TiCN coatings prepared under N2 gas flow rate by chemical vapour deposition (CVD) process at higher temperature

(2020) Soham Das et al.   CERAMICS INTERNATIONAL

High-temperature thermal stability and oxidation resistance of Cr and Ta co-alloyed Ti − Al − N coatings deposited by cathodic arc evaporation

(2020) Bin Peng et al.   CORROSION SCIENCE

Wear behavior and thermal stability of HPPMS (Al,Ti,Cr,Si)ON, (Al,Ti,Cr,Si)N and (Ti,Al,Cr,Si)N coatings for cutting tools

(2020) K. Bobzin et al.   SURFACE & COATINGS TECHNOLOGY

Unravelling local environments in mixed TiO2–SiO2 thin films by XPS and ab initio calculations

(2020) Pavel Ondračka et al.   APPLIED SURFACE SCIENCE

Correlation between fracture characteristics and valence electron concentration of sputtered Hf-C-N based thin films

(2020) T. Glechner et al.   SURFACE & COATINGS TECHNOLOGY

Ta addition effects on the structure, mechanical and thermal properties of sputtered Hf-Ta-C film

(2019) Xinlei Gu et al.   CERAMICS INTERNATIONAL

In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition

(2019) Johanna Reif et al.   MICROELECTRONIC ENGINEERING

Assessment of ductile character in superhard Ta-C-N thin films

(2019) T. Glechner et al.   ACTA MATERIALIA

Hard yet tough CrN/Si3N4 multilayer coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering

(2019) Y.X. Ou et al.   APPLIED SURFACE SCIENCE

Structural, hardness and toughness evolution in Si-incorporated TaC films

(2018) Suxuan Du et al.   CERAMICS INTERNATIONAL

Crystallization of SiC and its effects on microstructure, hardness and toughness in TaC/SiC multilayer films

(2018) Suxuan Du et al.   CERAMICS INTERNATIONAL

Superlow friction and oxidation analysis of hydrogenated amorphous silicon films under high temperature

(2018) Qunfeng Zeng et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS

High-temperature tribology and oxidation of Ti 1−x−y Al x Ta y N hard coatings

(2018) Birgit Grossmann et al.   SURFACE & COATINGS TECHNOLOGY

Tribochemistry dependent tribological behavior of superhard TaC/SiC multilayer films

(2018) Suxuan Du et al.   SURFACE & COATINGS TECHNOLOGY

Spectral fit refinement in XPS analysis technique and its practical applications

(2018) A.V. Boryakov et al.   JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA

Tuning structure and mechanical properties of Ta-C coatings by N-alloying and vacancy population

(2018) T. Glechner et al.   Scientific Reports

Temperature-dependent structural transformation and friction behavior of nanocomposite VCN-(Ag) coatings

(2018) Andrey V. Bondarev et al.   MATERIALS & DESIGN

Fabrication of Ta-Si-C targets and their utilization for deposition of low friction wear resistant nanocomposite Si-Ta-C-(N) coatings intended for wide temperature range tribological applications

(2018) A.V. Bondarev et al.   SURFACE & COATINGS TECHNOLOGY

High temperature solid-lubricating materials: A review

(2018) Shengyu Zhu et al.   TRIBOLOGY INTERNATIONAL

Efficient photoelectrochemical water splitting on ultrasmall defect-rich TaOx nanoclusters enhanced by size-selected Pt nanocluster promoters

(2017) Saurabh Srivastava et al.   Nanoscale

Oxidation behavior of Ta Si N coatings

(2017) Yung-I Chen et al.   SURFACE & COATINGS TECHNOLOGY

Wear behaviour of wear-resistant adaptive nano-multilayered Ti-Al-Mo-N coatings

(2016) V.S. Sergevnin et al.   APPLIED SURFACE SCIENCE

Ellipsometric, XPS and FTIR study on SiCN films deposited by hot-wire chemical vapor deposition method

(2016) Md. Momtazur Rahman et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

A new insight into hard low friction MoCN–Ag coatings intended for applications in wide temperature range

(2016) A.V. Bondarev et al.   MATERIALS & DESIGN

A route to increase fracture toughness of layered Si3N4/SiC composite using interlocked interfaces

(2015) Feng Ye et al.   CERAMICS INTERNATIONAL

Effect of the nitrogen flow on the properties of Si-C-N amorphous thin films produced by magnetron sputtering

(2015) A. O. Kozak et al.   Journal of Superhard Materials

Kinetics of shift of individual interfaces in Ni/Si system during low temperature reactions

(2015) S.S. Shenouda et al.   MICROELECTRONIC ENGINEERING

Evaluation of crack resistance of CrSiCN coatings as a function of Si concentration via nanoindentation

(2015) Qianzhi Wang et al.   SURFACE & COATINGS TECHNOLOGY

Characterization of Ta–Si–N coatings prepared using direct current magnetron co-sputtering

(2014) Yung-I Chen et al.   APPLIED SURFACE SCIENCE

Hard coatings with high temperature adaptive lubrication and contact thermal management: review

(2014) A.A. Voevodin et al.   SURFACE & COATINGS TECHNOLOGY

Lubricious oxide coatings for extreme temperature applications: A review

(2014) S.M. Aouadi et al.   SURFACE & COATINGS TECHNOLOGY

Effects of nitrogen composition on the resistivity of reactively sputtered TaN thin films

(2014) Nishat Arshi et al.   SURFACE AND INTERFACE ANALYSIS

Stoichiometry behavior of TaN, TaCN and TaC thin films produced by magnetron sputtering

(2013) M. Vargas et al.   APPLIED SURFACE SCIENCE

Interface engineering for the TaN/Ta barrier film deposition process to control Ta-crystal growth

(2013) Lukas Gerlich et al.   MICROELECTRONIC ENGINEERING

Vanadium containing self-adaptive low-friction hard coatings for high-temperature applications: A review

(2013) Robert Franz et al.   SURFACE & COATINGS TECHNOLOGY

Hard nanocomposite coatings: Thermal stability, oxidation resistance and toughness

(2012) J. Musil   SURFACE & COATINGS TECHNOLOGY

Properties of TaSiN thin films deposited by reactive radio frequency magnetron sputtering

(2012) Biljana Mešić et al.   THIN SOLID FILMS

Influence of Zr and O on the structure and properties of TiC(N) coatings deposited by magnetron sputtering of composite TiC0.5+ZrO2 and (Ti, Zr)C0.5+ZrO2 targets

(2011) D.V. Shtansky et al.   SURFACE & COATINGS TECHNOLOGY

Formation of self-organized Ta nano-structures by argon ion sputtering of Ta foil: XPS and AFM study

(2010) V.R.R. Medicherla et al.   JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA

Oxidation resistance and mechanical property of cosputtered quasi-amorphous Ta–Si–N films under vacuum rapid thermal annealing

(2010) C.K. Chung et al.   SURFACE & COATINGS TECHNOLOGY

Effect of the carbon content on the structure and mechanical properties of Ti–Si–C coatings by cathodic arc evaporation

(2010) Chi-Lung Chang et al.   SURFACE & COATINGS TECHNOLOGY

Effect of Si/Ta and nitrogen ratios on the thermal stability of Ta–Si–N thin films

(2009) C.K. Chung et al.   MICROELECTRONIC ENGINEERING

XPS depth-profile of the suboxide distribution at the native oxide/Ta interface

(2008) Manika Khanuja et al.   JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA

X-ray photoelectron spectroscopy of Er3+-activated SiO2–HfO2glass-ceramic waveguides

(2008) L Minati et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

United Gauss–Pearson-IV distribution model of ions implanted into silicon☆

(2008) Haipeng Zhang et al.   SOLID STATE IONICS

Effects of processing parameters on the properties of tantalum nitride thin films deposited by reactive sputtering

(2007) J. Nazon et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films

(2007) V. Kulikovsky et al.   SURFACE & COATINGS TECHNOLOGY