Formation of self-organized Ta nano-structures by argon ion sputtering of Ta foil: XPS and AFM study

标题
Formation of self-organized Ta nano-structures by argon ion sputtering of Ta foil: XPS and AFM study
作者
关键词
-
出版物
出版商
Elsevier BV
发表日期
2010-02-20
DOI
10.1016/j.elspec.2010.02.006

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